蒸鍍機

Vacuum Chamber
• Stainless steel corrosion resistant
   Inner enclosure
• Stainless steel
• Temperature-controlled range: up to -40°C to 80°C
   Deposition Sources
• Special Low Temperature Evaporator (SLTE): 50°C - 600°C
• Very fast ramp-down
• Ultra-Low Temperature Evaporator (ULTE): -10°C - 170°C
• Temperature stability: < +/- 0.1 K
• Individual Quartz Crystal Monitor (QCM): temperature controlled up to -40°C
   to 80°C
• Up to 4 sources
• Layer uniformity < +/-5 %
• Low crass-talk between each source and its neighboring QCM
  SUBSTRATE
• Size up to 50x50 mm
• Manual Shutter (option: pneumatic operated)
• Manual mask
• Option: temperature control -10°C-100°C